fab提供的map如下:
conducting_layers
POLY1 poly RPSQ=7.85
METAL1 metal1 RPSQ=0.11
METAL2 metal2 RPSQ=0.065
METAL3 metal3 RPSQ=0.065
METAL4 metal4 RPSQ=0.065
METAL5 metal5 RPSQ=0.065
METAL6 metal6 RPSQ=0.0202
via_layers
CONT polyCont AREA=0.0256 RPV=11
VIA12 via1 AREA=0.0361 RPV=1.0
VIA23 via2 AREA=0.0361 RPV=1.0
VIA34 via3 AREA=0.0361 RPV=1.0
VIA45 via4 AREA=0.0361 RPV=1.0
VIA56 via5a AREA=0.1296 RPV=0.45
RPSQ和RPV
resistor per square
resistor per via